화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2014년 가을 (11/12 ~ 11/14, 엑스코(대구))
권호 18권 2호
발표분야 나노-포스터
제목 Properties and Characterization of sodium silicate based silica aerogel film at ambient pressure
초록 Recently, there have been considerable investigations to improve the dielectric constant of silica semiconductor. However, most of reports tetraethylorthosilicate or tetramethylorthosilicate are mainly used as SiO2 precursors which are undoubtedly expensive and hazardous. Meanwhile, using hydrogen plasma treatment desired properties such as a stable low dielectric constant for silica aerogel films can be attained.  In the present study the effect of hydrogen plasma treatment on the properties of silica aerogel film obtained at ambient pressure using less expensive silica precursor (sodium silicate) was studied. The aerogels were characterized by FTIR and SEM analyses in order to determine the structure and morphology of the films. The possibility of producing silica aerogel films with appreciable properties from less expensive source will promote large scale production of dielectric materials for various applications.
저자 전순정, 박성수, Shao Godlisten Namwel, 김희택
소속 한양대
키워드 Waterglass; Silica aerogel film; plasma treatment
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