| 학회 | 한국재료학회 |
| 학술대회 | 2017년 봄 (05/17 ~ 05/19, 목포 현대호텔) |
| 권호 | 23권 1호 |
| 발표분야 | 2. 나노화학바이오소재를 이용한 센서 관련 기술(Sensor related technologies using nano-chemical and biological materials) |
| 제목 | MEMS와 박막기술을 이용한 마이크로가스센서 |
| 초록 | MEMS technology is used to fabricate micro gas sensors to reduce the power consumption of the sensors or to enhance their gas sensitivity to specific gases [1], and has a possibility to make the micro gas sensors miniaturization for portable devices [2]. The development of thin film based micro gas sensors using MEMS processes have advantages on mass productivity and cost effectiveness. And it is more suitable for well-defined sensing surface area exactly on the sensing electrode than drop casting process of nanomaterials dispersed in solution. In this work, the thin film based micro gas sensors using undoped and Pt-doped SnO2 thin films with the thicknesses of 50 and 120 nm as a sensing material were fabricated and their sensing properties to 25 ppm CO, 25 ppm toluene, and 1 ppm HCHO gases with various power consumption from 24.5 mW (300℃) to 45 mW (440℃) were characterized. The sensors display some selectivity to HCHO and toluene gases (Pt-doped 120 nm SnO2 gas sensors to 1 ppm HCHO gas at 31.5 mW power consumption; Pt-doped 120 nm SnO2 gas sensor to 25 ppm toluene gas) but no sensitivity to CO gas. The results of this study suggest the possibility of employing thin film-based micro gas sensor, which have significant advantages on mass productivity and cost effectiveness. Presentation contents will include research results based on the recently accepted paper by the authors [3]. Co-Corresponding author: [email protected] (박준식 박사) [Acknowledgement] This research was supported by the Project No. 10043800 of “S/W converged components technology development program” by KEIT and MOTIE in Korea. References [1] D. Briand, B. Schoot, N. Rooij, A low-power micromachined MOSFET gas sensor, Journal of microelectromechanical systems, 9, 3, 2000. [2] U. Dibbern, A substrate for thin-film gas sensors in microelectronic technology, Sensors and Actuators B, 2, 63- 70, 1990. [3] Jun-gu Kang, Joon-Shik Park, Hoo-Jeong Lee, Pt-doped SnO2 thin film based micro gas sensors with high selectivity to toluene and HCHO, Sensors and Actuators B (accepted). |
| 저자 | 강준구1, 박준식2, 이후정3 |
| 소속 | 1성균관대 신소재공학과와 KETI 스마트센서연구센터, 2전자부품(연), 3성균관대 신소재공학과 |
| 키워드 | <P>박막형; 마이크로 가스센서; MEMS; HCHO; Toluene</P> |
