| 학회 |
한국공업화학회 |
| 학술대회 |
2019년 봄 (05/01 ~ 05/03, 부산 벡스코(BEXCO)) |
| 권호 |
23권 1호 |
| 발표분야 |
고분자_포스터 |
| 제목 |
Fabrication of Multiple Patterned Polycarbonate Film Using Nano-Sphere, Dry Etching, and Micro-Imprinting Lithography |
| 초록 |
Hierarchical multiple patterns incorporating different nano or micropatterns have attracted great attention as next generation highly efficient patterns owing to the combination of the advantages of both materials. In this study, we report the new approaches for fabricating the hierarchical multiple patterns by combination of patterning process including nano-sphere lithography based on langmuir blodgett and dry etching methods for fabrication of nano-sized patterns and micro-imprinting method for fabrication of micro-sized patterns. The nanopatterns were first prepared and then the supporting layers were introduced to prevent the depression of the nanopattern in the imprinting process. The fabricated hierarchical multiple patterns clearly had micro-sized stripe patterns and nano-sized hole patterns. Our studies provide a facile route to realize efficient hierarchical structures for chemical sensor, optoelectronic devices, holographical lenses. |
| 저자 |
이윤호1, 김홍기2, 김용희2, 이상진3, 오준학4
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| 소속 |
1나노기반 소프트일렉트로닉스 연구단 (CASE) / 서울대, 2POSTECH / 서울대, 3삼성디스플레이, 4서울대 |
| 키워드 |
Multiple Patterns; Dry Etching; Micro-Stamping
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| E-Mail |
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