화학공학소재연구정보센터
학회 한국재료학회
학술대회 2004년 봄 (05/14 ~ 05/14, 강릉대학교)
권호 10권 1호
발표분야 반도체 I (실리콘)
제목 CdIn2S4 박막 성장과 광학적 특성
초록 A stoichiometric mixture of evaporating materials for CdIn2S4 single crystal thin films was prepared from horizontal furnace. To obtain the single crystal thin films, CdIn2S4 mixed crystal was deposited on thoroughly etched semi-insulating GaAs(100) substrate by hot wall epitaxy(HWE) system. The source and substrate temperatures were 630 ℃ and 420 ℃, respectively. The crystalline structure of single crystal thin films was investigated by the photoluminescence and double crystal X-ray diffraction(DCXD). The carrier density and mobility of CdIn2S4 single crystal thin films measured from Hall effect by van der Pauw method are 9.01×1016 cm-3 and 219 cm2/V-s at 293 K, respectively. From the optical absorption measurement, the temperature dependence of energy band gap on CdIn2S4 single crystal thin films was found to be Eg(T) = 2.7116 eV - (7.74 × 10-4 eV) T2/(T+434). After the as-grown CdIn2S4 single crystal thin films was annealed in Cd-, S-, and In-atmospheres, the origin of point defects of CdIn2S4 single crystal thin films has been investigated by the photoluminescence(PL) at 10 K. The native defects of VCd, VS, Cdint, and Sint obtained by PL measurements were classified as a donors or acceptors type. And we concluded that the heat-treatment in the S-atmosphere converted CdIn2S4 single crystal thin films to an optical p-type. Also, we confirmed that In in CdIn2S4/GaAs did not form the native defects because In in CdIn2S4 single crystal thin films existed in the form of stable bonds.
저자 윤석진, 홍광준
소속 조선대
키워드 CdIn2S4 single crystal thin; carrier density; mobility; photoluminescence; origin of point defects
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