| 학회 |
한국재료학회 |
| 학술대회 |
2009년 봄 (05/21 ~ 05/22, 무주리조트) |
| 권호 |
15권 1호 |
| 발표분야 |
반도체재료 |
| 제목 |
CO gas sensors based on ZnO:Al/Au composite thin films |
| 초록 |
Al-doped ZnO (ZnO:Al) thin films were deposited on self-assembled Au nanodots fabricated on SiO2/Si (100) substrates by rf co-sputtering from separated metallic Zn and Al targets for CO gas sensing application. The surface composition of ZnO:Al/Au thin films analyzed by XPS showed the surface structure like ZnO/Au composites with the Au/Zn atomic ratio on the surface 0.165. It was found from gas sensing measurements that the ZnO:Al/Au thin films were sensitive to CO even at a low concentration of 5 ppm and exhibited a high sensitivity to CO in dry air in a wide range of working temperature from 150 to 400 oC with a maximum sensitivity of 640% to 20 ppm CO gas at a temperature of 250 oC. Moreover, the ZnO:Al/Au thin film sensors showed fast response and recovery to CO gas in comparison with conventional Al-doped ZnO films. These enhancements are attributed to the double role of Au dots; Au dots played the role of a buffer layer for the abnormal grain growth of ZnO:Al thin films, resulting in high surface roughness and the role of catalyst through the spillover effect during gas detecting process for the ZnO:Al/Au thin films. |
| 저자 |
Nguyen Le Hung1, Eunseong Ahn2, Seongyong Park1, Hoocheol Jung2, Hyojin Kim1, Dojin Kim2
|
| 소속 |
1Department of Materials Science and Engineering, 2Chungnam National Univ. |
| 키워드 |
ZnO:Al; Au nanodots; CO gas sensor
|
| E-Mail |
|
