| 초록 |
Normally, ceramic compacts are manufactured in bulk,(and) include sintering as an indispensable process, but they have a disadvantage that the grain size increases during sintering. However, when the PZT thin film is fabricated by the AD method, strong impacted particles are broken into several nanometers of grain, and a thin film having a high density can be obtained. So we made PZT films with these advantages. In this study, The crystallinity of the PZT film was improved by heat treatment (450, 550, 650oC). And increase of crystallinity by heat treatment can be analyzed by XRD. Density, thickness and grainsize of the film were observed by SEM. Dielectric properties of PZT film were measured by impedance analyzer and standard ferroelectric test system. |
