| 학회 |
한국재료학회 |
| 학술대회 |
2017년 가을 (11/15 ~ 11/17, 경주 현대호텔) |
| 권호 |
23권 2호 |
| 발표분야 |
G. 나노/박막 재료 분과 |
| 제목 |
Development of Functional Heat Film Manufacturing Technologies |
| 초록 |
Functional Heat Films on an Index matching/PET as a Noxious Ultraviolet Protective Heat (NUPH) Films was prepared by ECR-CVD. Under plasma environment, the NUPH films were fabricated by supplying tetra-methyl tin (TMT) as precursors for tin, Tricarbon-hexafluoride (C3F6) as precursor for fluorine atoms, H-1 film (Security Product Code) as heat layer for thermal element, oxygen and hydrogen as reaction gases in Roll to Roll deposition systems. The result shows that the NUPH films have nanocrystalline structure with a grain size of 30-60 nm, a thickness of under 100 nm and transmittance over 85 %. The observed lowest sheet resistance of 10 ohm/sq. was found in our experimental range. We conclude that the optimum content of fluorine doping plays an important role to affect the structural, electrical, optical, noxious protective and thermal properties of the flexible smart films as Noxious Ultraviolet Protective Heater (NUPH). |
| 저자 |
Yeo Jo Yoon1, Jin Ki Roh2, Jaehyun Kim3, Ji Hun Park1
|
| 소속 |
1IM R&D Display Group, 2IM R&D, 3Hanyang Univ. |
| 키워드 |
Transparent Heater; ECR-CVD; Flexible Heat Films
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| E-Mail |
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