화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2005년 가을 (10/21 ~ 10/22, 인하대학교)
권호 11권 2호, p.2475
발표분야 재료
제목 Micropatterning of Metal Substrate by Adhesive Force Lithography
초록 We introduce adhesive force lithography (AFL), a detachment-based method for patterning metal surface. In this method, all the polymer layer except for the desired pattern gets lifted up from the metal surface. The craze microstructure unique to thin polymer films on the order of 102 nm is utilized for this AFL along with a difference in adhesive force at two interfaces. Poly(urethaneacrylate) mold, which has a high enough work of adhesion with polymer, makes AFL effective. This technique is purely additive, fast (~10s contact time), and applicable to large area patterning (10 cm X10 cm).
저자 서순민, 이홍희
소속 서울대
키워드 Unconventional lithography; Adhesive force lithography; PUA
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