| 학회 |
한국공업화학회 |
| 학술대회 |
2011년 가을 (11/02 ~ 11/04, 경원대학교) |
| 권호 |
15권 2호 |
| 발표분야 |
나노 |
| 제목 |
Patterning of gold nanoparticles by ion beam contact lithography and oxygen plasma treatment |
| 초록 |
In this study, the patterns of gold nanoparticles (Au NPs) were generated by ion beam contact lithography followed by oxygen plasma treatment. Thin polymer films containing various amounts of HAuCl4 were patterned by ion beam contact lithography. Afterwards, the formed patterns underwent O2 plasma treatment to produce the patterns of Au NPs together with the removal of crosslinked polymers. The patterns of Au NPs were investigated by FE-SEM with an energy dispersive X-ray spectrometer before and after oxygen plasma treatment. |
| 저자 |
정창희1, 강동우2, 정찬희2, 황인태2, 최재학2, 노영창2, 문성용3, 이정수4, 장지현4
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| 소속 |
1서강대, 2한국원자력(연), 3한양대, 4울산과학기술대 |
| 키워드 |
Patterning; Nanoparticle; Ion beam; Plasma
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| E-Mail |
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