화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2014년 가을 (10/22 ~ 10/24, 대전 DCC)
권호 20권 2호, p.1169
발표분야 고분자
제목 A novel polymer semiconductor processing technology toward highly cost effective, environment-friendly and ultra-uniform large areal transistor arrays
초록   Brand-new copolymer (PDPPBTTSVS) exhibited unprecedented high mobility up to 3 cm2/Vs in optimal state. We developed a novel, cost-effective semiconductor deposition technique which can be characterized as environmental benign process enabled by molecular engineering, reducing the consumption of expensive solute enabled by vertical phase separation and minimizing the amount of solution enabled by our method. Based on non-chlorinated solvents, we developed optimal thin film deposition method using blend solution consisting of highly conductive PDPPBTTSVS and inert Poly-α-MethylStyrene. Furthermore, by applying our method, we could fabricate ultra-uniform 4 inch semiconductor film only with 40μg of PDPPBTTSVS, which is almost three orders of magnitude lower than that required for conventional spin-coating method. The resulting transistor array deposited onto 4 inch wafer revealed excellent performances with extremely narrow spatial distribution and near-zero threshold voltage.
저자 조장환1, 정대성1, 고영운1, 장석태1, 윤희준2, 김윤희2, 권순기2
소속 1중앙대, 2경상대
키워드 large area; transistor; ultra-uniform
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