| 초록 |
The treatment of block copolymer thin film with its solvent vapor has been known as an effective way to control both orientation of microdomains and their registration into a periodic lattice structure. We have demonstrated hierarchically ordered cylindrical microdomains in a PS-b-PEO thin film combined with microcontact printing. Well ordered spherical PEO microdomains were produced by confined dewetting of thin films micropatterned on chemically modified surface pattern with SAMs during solvent annealing. In order to further control thin film upon solvent annealing, we introduce a new patterning, Plasma Enhanced Polymer Transfer Printing(PEPTP) where a block copolymer film spin cast on a patterned PDMS mold is transferred to a substrate with oxygen plasma. The microstructure of the block copolymer film micropatterned by PEPTP is ordered by the subsequent solvent annealing performed in the apparatus we newly designed with quantitative control of temperature, water and solvent vapor. |
