| 학회 | 한국재료학회 |
| 학술대회 | 2016년 가을 (11/16 ~ 11/18, 경주 현대호텔) |
| 권호 | 22권 2호 |
| 발표분야 | E. 환경/센서 재료 분과 |
| 제목 | Self Powered Flexible Piezoelectric Pressure Sensor for Health Care Monitoring |
| 초록 | In the upcoming internet of things (IoT) era, flexible pressure sensors have recently attracted increasing interests in many fields such as electronic skin, flexible display and human machine interaction. Especially, flexible pressure sensors are essential in health care fields such as heartbeat, arterial waveform and pulse wave velocity because these signs show significant information about cardiovascular diseases. Many researchers have developed various flexible pressure sensor based on piezo-resistive, capacitive and optical types. However, these types of pressure sensors have drawback about operating power consumption. It is avoidable for these sensors to apply voltage during the operation, which will cause power consumption problems and increase the cost and weight of devices. Herein, we demonstrate a self-powered, PZT based flexible pressure sensor on ultra-thin polyethylene terephthalate (PET, 4.8um) substrate via inorganic laser lift off (ILLO) and thermal release tape transfer. After PZT thin film transferred to PET substrate, Au top electrode is deposited by RF sputtering. Because reducing the substrate thickness can decrease bending rigidity, we have used ultra-thin PET substrate that improving conformal contact of flexible sensor to arbitrary curved surface. Piezoelectric based flexible pressure sensors that convert mechanical deformation into electrical energy are not needed external power source, so these sensors can simplify the device packaging by removing heavy battery components. |
| 저자 | 박대용, 이건재 |
| 소속 | KAIST |
| 키워드 | <P>Self powered; piezoelectric; pressure sensor; wrist pulse</P> |
