화학공학소재연구정보센터
학회 한국재료학회
학술대회 2017년 가을 (11/15 ~ 11/17, 경주 현대호텔)
권호 23권 2호
발표분야 10. 원자층 증착법의 최근 연구 동향(Recent Progress of Atomic Layer Deposition)
제목 Atomic layer deposition: A new enabler for renewable energy generation and storage applications
초록 Atomic layer deposition (ALD) has been long considered only for the semiconductor industries that includes high-k dielectrics or metal interconnect required for the micro-electronic circuits. However, the same unique features like precise thickness control, excellent uniformity and conformality of the ALD grown films, also made it one of the most explored technology in the field of renewable energy generations and in the electrochemical energy storages. While ALD has already been used in the field of solar photovoltaic (PV) quite extensively, it has been adopted relatively in more recent times in the field of secondary batteries (Li-ion, Na-ion, Li-S and Li-O2), supercapacitor and in water splitting. In solar PV, ALD was successfully demonstrated in almost all kind of different PV technologies including the Si-based to the latest perovskite based solar cells [1, 2]. Significant research has been done on ALD coating of a very thin Al2O3 layer on active electrode materials (e.g. LiCoO2) used for Li-ion battery which enhanced the cyclic stability considerably [3]. Relatively less amount of work has been cited for other types of secondary batteries. However, ALD was successfully used to prepare the 3-dimensional active electrode materials, solid state electrolytes and to engineer the surface of the conventional electrodes to improve the device performance. Last but not the least, ALD grown oxides (e.g. Fe2O3, TiO2, ZnO etc.) and sulfides (e.g. MoS2) are also shown as promising candidates for solar and photoelectrochemical water splitting [4, 5]. We have recently developed several methods for ALD of SnS, MoS2, WS2 and MoNx aiming their potential applications in the field of energy generation and storage. While, ALD grown SnS could be considered as a promising absorber material for thin film solar cells (TFSCs), WS2 has shown excellent performance towards water splitting [5,6]. On the other hand, the transition metal sulfides (MoS2 and WS2) and nitride (MoNx) are also successfully being tested as an electrode in Na-ion battery and in supercapacitor.  

References:
1. J. R. Bakke, K.L. Pickrahn, T. P. Brennan and S. F. Bent, “Nanoengineering and interfacial engineering of photovoltaics by atomic layer deposition”, Nanoscale, 2011, 3, 3482–3508.
2. V. Zardetto, B. L. Williams, A. Perrotta, F. Di Giacomo, M. A. Verheijen, R. Andriessen, W. M. M. Kesselsa and M. Creatore; “Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges”, Sustainable Energy Fuels, 2017, 1, 30–55.
3. X. Meng , X.-Q. Yang  and X. Sun, “Emerging Applications of Atomic Layer Deposition for Lithium-Ion Battery Studies”, Advance Materials, 2012, 24, 3589–3615.  
4. T. Singh, T. Lehnen, T. Leuning and S. Mathur, “Atomic layer deposition grown MOx thin films for solar water splitting: Prospects and challenges”, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2015, 33, 010801.
5. S. Oh, J. B. Kim, J. T. Song, J. Oh and S.-H. Kim, “Atomic layer deposited molybdenum disulfide on Si photocathodes for highly efficient photoelectrochemical water reduction reaction”, Journal of Material Chemistry A, 2017, 5, 3304–3310.
6. B. Jang, S. Yeo, H. Kim, B. Shin, S.-H. Kim, “Fabrication of single-phase SnS film by H2 annealing of amorphous SnSx prepared by atomic layer deposition”, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2017, 35, 031506.
저자 Soo-Hyun Kim1, Dip K. Nandi2
소속 1영남대, 2Yeungnam Univ.
키워드 <P>atomic layer deposition; solar photovoltaic; water splitting; Na-ion battery; supercapacitor </P>
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