| 학회 |
한국재료학회 |
| 학술대회 |
2004년 가을 (11/05 ~ 11/05, 인하대학교) |
| 권호 |
10권 2호 |
| 발표분야 |
기타 |
| 제목 |
균일한 기공을 갖는 양극산화된 알루미나 템프레이트에서 성장된 탄소나노튜브의 전계방출 소자 응용 |
| 초록 |
Carbon nanotube has been regarded as prospective materials for emitter of field emission display as well as other emitting devices, due to its efficient property of high current density, thermal and chemical stability and high aspect ratio. Although it has these excellent emission properties, it has non uniform length and weak adhesion to substrate. We report here a new fabricating method for triode type carbon nanotube field emitter synthesized on anodic aluminum oxide (AAO) template in order to overcome these obstacles. AAO has been recently emerged as a template to synthesize nano materials because of its regular arranged nanopores. It was fabricated on Si substrate using electro-plating method. Carbon nanotube was synthesized on the selective area using well developed semiconductor process with Plasma Enhanced Chemical Vapor Deposition method. The morphology and crystallinity of nanotubes were analyzed by FE-SEM, HRTEM and Raman spectroscopy. The high current density of few mA/cm2 was measured in our new diode structure field emitter and much higher field enhancement factor was calculated from our emission device. The new fabricating process will be applied to produce triode field emission device successfully. |
| 저자 |
W. J. Yu1, Y. S. Cho2, G. S. Choi1, D. J. Kim2
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| 소속 |
1Department of Materials Science and Engineering, 2Chungnam National Univ. |
| 키워드 |
Carbon nanotubes; Field emission; Triode; FED; AAO
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| E-Mail |
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