| 학회 |
한국재료학회 |
| 학술대회 |
2012년 봄 (05/17 ~ 05/18, 무주덕유산리조트) |
| 권호 |
18권 1호 |
| 발표분야 |
F. 광기능/디스플레이 재료(Optical Functional and Display Materials) |
| 제목 |
Fabrication of low resistance and high transparent Ti doped InZnO(TIZO)/Ag/TIZO thin films using combinatorial magnetron sputtering system |
| 초록 |
Transparent condudcting oxides (TCOs) have attracted considerable interest because of their potential applications as transparent electrodes in organic light emitting diodes (OLEDs), flat panel display, and optoelectric devices. In this study, we have investigated the structural, optical, and electrical properties of multi layered-films(Ti-doped InZnO(TIZO)/Ag/TIZO) fabricated by inserting a thin Ag layer using the combinatorial magnetron sputtering system. All multi layer films deposited at room temperature showed the amorphous phase. Under optimized condition, TIZO/Ag/TIZO multi layer exhibited the lowest sheet resistance of 7ohm/sq and the highest average transmittance above 87% at visible wavelength. This indicates that TIZO/Ag/TIZO multilayer electrodes are promising transparent conducting oxides (TCOs) due to their fairly low resistivity and high optical transmittance. |
| 저자 |
Jae-Cheol Park1, Yu-Ri Lee2, Jeong-Pyo Oh3, Young-Jun Lee4, Gi-Seok Heo5
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| 소속 |
1National Center for Nanoprocess and Equipments, 2Korea Institute of Industrial Technology, 3Gwangju, 4Korea, 5Department of Advanced Materials Engineering |
| 키워드 |
TCOs; Ti-doped IZO; DSSC
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| E-Mail |
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