| 초록 |
In this study, three layers of polystyrene-block-poly(methyl methacrylate) copolymers (PS-b-PMMA)films with differnt fractions of PMMA are consecutively spin-coated and annealed at high temperature, followed by ozone treatment. Due to the crosslinking of PS chains by ozone treatment, we could succeed in preparations of three different PS-b-PMMA solutions. Then, all the PMMA phases in the three layeres selectively removed by UV irradiation followed by acetic acid rinsing. Because of using three different PMMA volume fractions (thus, the pore volumes), the final film showed excellent antireflective properties (with less than 1 % of the reflectivity) at the broad wavelenghts covering visible and near IR regions(450 ~1500 nm). |
