초록 |
Broadband antireflection (AR) coating covering from visible light to near infrared wavelengths (400 ~ 2000 nm) was carried out by using three sequential spin coatings of polystyrene-block-poly(methyl methacrylate) copolymers (PS-b-PMMA) with different volume fractions of PMMA block on a glass. PS-b-PMMA having the lowest PMMA volume fraction among three PS-b-PMMAs was first spin-coated on a glass substrate. After spin-coating, the film was irradiated by ozone to prevent the dissolution during the next spin-coating process. PS-b-PMMA with the next larger volume fraction of PMMA block was spin-coated, and irradiated again by ozone again. Finally, PS-b-PMMA with the largest volume fraction of PS block was spin-coated and after sequential spin-coatings, the entire film was irradiated under UV followed by rinsing with acetic acid to remove PMMA selectively. This three layered nanoporous film exhibited an excellent AR at whole measured wavelengths, from 400 and 2000 nm, under ~1%. |