초록 |
We fabricated three dimensional nanotemplates using crosslinkable block copolymers (BCPs). We synthesized crosslinkable cylinder- or lamellar-forming BCPs, P(S-r-(S-N3))-b-PMMA, in which 1.5 mol % of crosslinkable azide (N3) groups were incorporated. First, thin films of P(S-r-(S-N3))-b-PMMA BCPs, exhibiting either perpendicularly oriented cylinders or lamellae, were prepared on the silicon substrates that were neutralized with PS-PMMA random copolymers. To construct the BCP multilayers, the films were thermally crosslinked, and then cylinder- or lamellar-forming BCPs were prepared on top without disturbing the underlying layers. Interestingly, it was observed that lamellae on cylinder and cylinder on lamellae layers exhibit the perpendicular orientations. This may suggest that the underlying layers could neutralize the interfacial interactions as PS-PMMA random copolymers, although the detailed interfacial interactions between cylinder/lamellar layers need to be further investigated. |