| 학회 | 한국재료학회 |
| 학술대회 | 2012년 가을 (11/07 ~ 11/09, 라카이샌드파인 리조트) |
| 권호 | 18권 2호 |
| 발표분야 | B. 나노재료(Nanomaterials) |
| 제목 | The study of optical and electrical properties in ZnO films and nanowires using metal-organic chemical vapor deposition |
| 초록 | ZnO is widely used in various devices such as transparent electrodes, blue or ultraviolet light emitting devices and thin-film transistors. ZnO has attracted a lot of research interest because of their high transmittance properties, whose average is over 80% in the visible spectral region. It is expected to be optical devices such as anti-reflection coating, and transparent conductive oxide for solar cells. In this study, ZnO films and nanowires were grown on glass substrate by metal organic chemical vapor deposition (MOCVD). Deposition was carried out in the temperature range from 300oC to 800oC and glass substrate temperatures affected the growth mode of either film or nanowire. ZnO films were obtained at 300-500oC, and ZnO nanowires resulted at 600-800oC. We investigated that the ZnO nanowires improve the transmittance and had a great effect on the macroscopic electrical performance than ZnO films grown at 300-500oC. |
| 저자 | 김대식1, 최은석2, 이도한1, 조성찬2, 변동진1 |
| 소속 | 1고려대, 2서울 성북구 안암동 고려대 |
| 키워드 | ZnO; nanowires; thin films; MOCVD |
