화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2014년 가을 (10/22 ~ 10/24, 대전 DCC)
권호 20권 2호, p.1184
발표분야 고분자
제목 Omniphobic Micropatterns Containing Overhanging Structures Created by Unconventional Photolithography
초록 Photolithography uses local crosslinking or degradation of photoresist by selective exposure of ultraviolet (UV) light. This enables the preparation of micropatterns useful for a wide range of applications including semi-conductor and LCD processing. However, photolithography only can produce two dimensional structures with vertical walls. To overcome the limitation, we have developed a modified photolithography technique which uses oxygen-inhibition phenomenon during photopolymerization. Here, we prepare microarrays of hammer-like structures which can facilitate trapping of air pockets, thereby providing omniphobic property. Head and handle parts of the structures are sequentially prepared by step-by-step applications of the unconventional photolithography using a single photomask; diameter of the handle is set to be smaller than that of head by inhibiting photopolymerization by oxygen diffusion in a controlled fashion. The array of hammer-like structures exhibits hydrophobic and oleophobic properties at the same time owing to sharp corner of the head.
저자 김주현1, 심태섭2, 김신현1
소속 1KAIST, 2Univ. of Pennsylvania
키워드 Photolithography; Omniphobic; Hammer-like structures
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