| 초록 |
The bottom up approach using self-assembly of block copolymers (BCP) have been considered as a powerful technique in nanolithography. For practical applications, the perpendicular orientation of microdomains to the substrate is a prerequisite. However, in most cases, one of domains has a preferential interaction with the substrate and induces parallel orientation. Previously, we demonstrated that thermally stable neutral Au NPs can induce perpendicular orientation of BCP thin films without any substrate treatment. In this case, we can easily trace the location of Au NPs within BCP thin films but the Au NPs were still present in the thin film after etching because Au NPs are inorganic materials. In this study, we introduce neutral star polymer instead of neutral Au NPs to produce “etching-friendly nanocomposite thin films.” Also, the distributions of star polymer in thin film were investigated using neutron reflectivity. |
