| 초록 |
It has been well known that high degree of planarization is one of key properties required for TFT-LCD with good reliability. Further, transmittance, chemical resistance and photo patternability are very important properties required for this field. Therefore, we had synthesized novel colorless photosensitive polyimide oligomers based on cyclobutane-1,2,3,4-tetracarboxylic dianhydride(CBDA) from aromatic diamine and monoamine containing photosensitive group to obtain photosensitive polyimide oligomer with high degree of planarization, high transmittance, and good chemical resistance. In this study, we had also investigated effect of exposure dose, molecular weight of oligomer and concentration of developer on photosensitivity of the polyimides.
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