| 초록 |
Herein, we introduce a new strategy to achieve an anti-adhesion surface for the simple and rapid fabrication of nanostructures with high fidelity which is applicable to all types of stamping molds. In this study, the surface of various hard and soft molds was bound strongly and covalently with PDMS, which has good surface properties for the molding process like normal PDMS molds, and this was accomplished irrespective of the basic materials comprising the mold. Although we demonstrated high aspect ratio nanostructure replication, such as that of 150 nm lines with a height of 1.4 mm and 80 nm lines at least 400 nm in height, we do not believe that we reached the physical limit. Since this strategy could easily be extended to large area patterning, it represents a potential breakthrough in the production of nanopattern used in memory devices, as an alternative rubbing process for LCDs, anti-reflective optical coatings, MEMS/NEMS devices, and nano/biosensor devices. |
