화학공학소재연구정보센터
학회 한국재료학회
학술대회 2011년 봄 (05/26 ~ 05/27, 제주 휘닉스 아일랜드)
권호 17권 1호
발표분야 B. Nanomaterials and Processing Technology((나노소재기술)
제목 Innovative Cross Section Preparation Method for the Nanomaterials Using Argon Ion Beam
초록 Microstructure using scanning electron microscope provide useful information for the materials in research and development as well as failure analysis. Growing rapidly in nanotechnology, preparation of mirror like cross section surface without mechanical deformation or damage is one of the most important steps and becoming progressively more significant before microstructure observation. Among the various cross section preparation methods innovative polishing method with argon ion beam is start to be great use in industrial fields. It is believed that ion beam polisher is extremely useful tool for the material science and engineering. Here, we introduce application fields of ion beam polisher to various types of samples, i.e. metals, ceramics and polymers, in multilayer ceramic capacitors production.
저자 이창주, 김은혁
소속 삼성전기 LCR사업부 재료그룹
키워드 MLCC; Ion beam; Cross section; Polishing
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