| 초록 |
Vertically aligned arrays of multi-walled carbon nanotube (MWCNT) on layered Si substrates have been synthesized by water-assisted thermal chemical vapor deposition (CVD). The effect of process parameters on the growth mechanism were studied. Also, we adding a little amount of water vapor to the reaction gas mixture of argon and acetylene enhanced the growth. Before growth, we used a thin film of catalyst Invar36 (Fe 63wt%, Ni 37wt%) was coated on the buffer layer (Si wafer / Ti / Al) by thermal evaporator. There are many different results with water and without water. With water is very long growth so-called as “supper growth” than without water. We had confirmed water effects and long grown in length. Scanning electron microscopy (SEM) was used to study the alignment and length of the grown MWNTs, and high-resolution transmission electron microscopy (HR-TEM) was used to exam the wall numbers and diameters. |
