| 학회 |
한국재료학회 |
| 학술대회 |
2007년 봄 (05/10 ~ 05/11, 무주리조트) |
| 권호 |
13권 1호 |
| 발표분야 |
반도체재료 |
| 제목 |
Effect of atmosphere on vapor-liquid-solid growth of silicon nanowire |
| 초록 |
Silicon nanowires were synthesized through the vapor-liquid-solid mechanism. Silane was used as the source gas and gold was the catalyst metal. And chemical vapor deposition which is one of the most convenient method for nanowire synthesis was utilized. Most of the nanowires have straight form which is consist of crystalline silicon core and metal dot at the tip. The shape and the density of the wires were different according to the deposition circumstance. Especially the working pressure and the flow rate of the source gas affected to the diffusion of silicon source on the substrate. The authors investigated those effects on nanowire growth experimentally and showed the origin theoretically. |
| 저자 |
권선영, 김형준
|
| 소속 |
서울대 |
| 키워드 |
silicon nanowire; CVD; VLS; atmosphere
|
| E-Mail |
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