| 학회 |
한국화학공학회 |
| 학술대회 |
2011년 가을 (10/26 ~ 10/28, 송도컨벤시아) |
| 권호 |
17권 2호, p.1884 |
| 발표분야 |
재료 |
| 제목 |
Llithographically defined 3D carbon microstructures |
| 초록 |
We present a facile and effective route for the fabrication of carbon microstructures by direct carbonization of polymeric photoresist patterns without distortion or collapse of the microstructure due to high-temperature pyrolysis. The composition of pyrolyzed SU-8 photoresists was characterized by Raman spectroscopy. Current-sensing AFM was used to measure the local electrical conductivity of a 3D pyrolyzed carbon structure. The voltammetric properties of a 3D pyrolyzed carbon structure were also investigated. |
| 저자 |
김영찬, 문준혁
|
| 소속 |
서강대 |
| 키워드 |
광간섭 리소그래피 |
| E-Mail |
|
| 원문파일 |
초록 보기 |
