| 초록 |
Copper CMP with NH4OH solutions have been studied by many research groups. In electrochemical measurements, they suggested that copper dissolved into Cu(Ⅰ) followed by Cu(Ⅱ) and formed copper oxide. However there were no electrochemical studies combined with Electrochemical Quartz Crystal Microbalance (EQCM) and surface analysis. In this work, in order to describe copper dissolution mechanism, we concentrated on electrochemical study with EQCM and surface analysis. In NH4OH-containing media, there are two anodic current peaks during potentiodynamic measurement and they show different mass change ratio in each peak and analyzed by SEM, XPS and XRD.
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