| 초록 |
We prepared high-density nanopatterns by using atomic force microscope (AFM) at room temperature. For this purpose, we employed polystyrene-block-poly(n-pentyl methacrylate) copolymer (PS-b-PnPMA) having baroplasticity. PS-b-PnPMA thin film with an ordered state becomes high mobility upon pressure through the transition to disordered state. This unique property does not require any heating which is necessary for the existing technology such as IBM millipede method. To confirm the mechanism on the nanopattern formation, the inner structure of patterned thin film was observed by transmission electron microscopy (TEM) after it was cut by focused ion beam (FIB). We clearly found that phase transition indeed occurred from ordered state to disordered state by applying pressure. In addition, we can convert the depth of nanopattern to electric signal (0 or 1 as binary digits) by using piezoelectric sensing method. |
