학회 | 한국재료학회 |
학술대회 | 2004년 봄 (05/14 ~ 05/14, 강릉대학교) |
권호 | 10권 1호 |
발표분야 | 세라믹스 |
제목 | 섬유단상공정에 의한 폐 SiC 슬러지를 이용하여 다공질 SiC-Si3N4 복합재료의 제조 |
초록 | Abstract The cutting process of silicon wafers with a single crystal structure produced waste SiC sludge. It consists of silicon carbide, silicon and organic lubricant. The waste SiC sludge was purified by washing with organic solvents and purified raw materials were used for the fabrication of porous SiC-Si3N4 composites by fibrous monolithic process in which carbon was used as a pore forming agent. In burning-out process, carbon was fully removed and was successfully fabricated porous composite. The green bodies containing SiC, Si particles and sintering additives such as Y2O3 and AlN were nitrided at 1653K in a flowing of N2+10% H2 gas mixture. The crystal structure of porous composites existed α-Si3N4,β-Si3N4 and small amount of residual Si in SiC matrix. |
저자 | Asit kumar gain, 한재길, 이병택 |
소속 | 공주대 |
키워드 | Porous SiC-Si3N4 composite; Fibrous monolithic process |