| 초록 |
Generally, polymer deposition techniques are the wet-coating methods. The wet-coating methods suffer from various problems arising from the solvent, including impurity, difficulty in multilayer formation and microstructure control. We employed vapor deposition polymerization (VDP) to solve these problems. In this study, we used multilayer passivation film (polyimide/Al2O3). Polyimide film was prepared by VDP, reacting a diamine monomer with a dianhydride monomer. Al2O3 was deposited over the polyimide coated layer by DC sputtering. Polyimide was formed by co-evaporating 3,4,9,10-perylenetetracarboxylic dianhydride (PTCDA) and 1,12-diaminododecane (DADD). PTCDA and DADD formed thin films of polyamic acid, which was converted to polyimide by annealing in vacuum. Chemical characterization of polyimide films was conducted by fourier-transform infrared (FT-IR) spectroscopy. To confirm the effect of the multilayer passivation, we investigated the lifetime of the devices. |
