화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2008년 봄 (04/10 ~ 04/11, 컨벤션 뷰로(대전))
권호 33권 1호
발표분야 기능성 고분자
제목 Characterizations and patterning of conductive polythiophene films prepared by plasma-polymerization
초록 Highly transparent polythiophene(PT) thin-films were successfully synthesized by the plasma polymerization of thiophene. These films are doped and etched with O2 plasma by in-situ doping technique. Plasma polymerized PT films were deposited at about 50 to 340nm/min depending on the temperatures and plasma power. The resultant transparency was as high as 85%. Plasma polymerized PT films exhibited characteristics as insulator or semiconductor (1010~12Ω/□, 10-7S/cm). The conductivity was immediately increased up to 106Ω/□, 10-2S/cm with O2 plasma doping. Specifically, there films are solvent-free, pinhole-free, homogeneous and good adherent.
저자 김태욱, 김진열
소속 국민대
키워드 plasma polymerization; doping; patterning; PECVD
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