화학공학소재연구정보센터
학회 한국재료학회
학술대회 2008년 봄 (05/22 ~ 05/23, 상록리조트)
권호 14권 1호
발표분야 반도체재료
제목 Study on annealing effect of ZnSe/GaAs epilayers grown by hot wall epitaxy
초록 The ZnSe epilayers were grown on the GaAs substrate by hot wall epitaxy. After the ZnSe epilayers treated in the vacuum-, Zn-, and Se-atmosphere, respectively, the defects of the epilayer were investigated by means of the low-temperature photoluminescence measurement. The dominant peaks at 2.7988 eV and 2.7937 eV obtained from the PL spectrum of the as-grown ZnSe epilayer were found to be consistent with the upper and the lower polariton peak of the exciton, I2 (Do, X), bounded to the neutral donor associated with the Se-vacancy. This donor-impurity binding energy was calculated to be 25.3 meV. The exciton peak, I1d, at 2.7812 eV was confirmed to be bound to the neutral acceptor corresponded with the Zn-vacancy. The I1d peak was dominantly observed in the ZnSe/GaAs:Se epilayer treated in the Se-atmosphere. This Se-atmosphere treatment may convert the ZnSe/GaAs:Se epilayer into the p-type. The SA peak was found to be related to a complex donor like a (VSe - VZn) - VZn.
저자 이상열, 홍광준
소속 조선대
키워드 ZnSe; hot wall epitaxy; donor-impurity binding energy; donor bound extion energy; annealing treatment
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