| 학회 | 한국고분자학회 |
| 학술대회 | 2002년 봄 (04/12 ~ 04/13, 서울대학교) |
| 권호 | 27권 1호, p.169 |
| 발표분야 | 특별 심포지엄 |
| 제목 | Cross-linking: A new way to control the nano pore size in block copolymer template, keeping the same lateral distribution |
| 초록 | Recently, block copolymers with cylindrical nanodomains have been employed to the templates for the pattern formation with nano-scale due to easy fabrication. The pore size and inter-domain distance are determined by molecular weight and volume fraction of the block copolymers, giving a limitation to scale down the pore size since block copolymers get disordered in low molecular weight. In addition, the variation of the pore size without changing the inter-domain distance has not been studied so far. We propose a new way to get templates with controllable pore size using PS-b-PMMA with cylindrical nanodomains oriented vertically to the substrate. The block copolymer films were exposed to ozone at several temperatures for various time periods. Ozone in air can cross-linke the PS matrix, but doesn’t degrade PMMA cylinders. Then, the film was annealed at elevated temperature to get holes thermodynamically determined. The shrinkage to the lateral direction of PS blocks makes nano-holes inside the PMMA cylinder. The nano-pore size obtained from this method spanned from 0 ~ 25 nm with the same pore position. This is a convenient and a very effective way to make nano-wires with different radii, and further be employed to develop tera-level storage media. This work was supported by the ministry of education of Korea toward the Electrical and Computer Engineering Division at POSTECH through its BK21 program. |
| 저자 | 정운용1, 김진곤2, Thomas P. Russell*3 |
| 소속 | 1포항공대 화공과, 2*Univ. of Massachusettes, 3polymer science and engineering |
| 키워드 | |
