화학공학소재연구정보센터
학회 한국재료학회
학술대회 2003년 가을 (11/21 ~ 11/22, 연세대학교)
권호 9권 2호
발표분야 세라믹스
제목 GaN 단결정에 의해 제조된 Ga2O3 나노물질의 구조
초록 The metallic oxide nanomaterials including ZnO, Ga2O3, TiO2, and SnO2 have been synthesized by a number of methods including laser ablation, arc discharge, thermal annealing procedure, catalytic growth processes, and vapor transport. We have been interested in preparing the nanomaterials of Ga2O3, which is a wide band gap semiconductor (Eg=4.9 eV) and used as insulating oxide layer for all gallium-based semiconductor. Ga2O3 is stable at high temperature and a transparent oxide, which has potential application in optoelectronic devices. The Ga2O3 nanoparticles and nanobelts were produced using GaN single crystals, which were grown by flux method inside SUSTM cell using a Na flux and exhibit plate-like morphologies with 4 ~ 5 mm in size. In these experiments, the conventional electric furnace was used. GaN single crystals were pulverized in form of powder for the growth of Ga2O3 nanomaterials. The structure, morphology and composition of the products were studied mainly by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), and high-resolution transmission electron microscopy(HRTEM).
저자 박상언1, 조채룡2, 김종필3, 정세영2
소속 1(주) 컴텍스, 2한국기초과학지원(연), 3부산분소
키워드 GaN; Ga2O3; nanopowder; nanobelt
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