| 초록 |
The synthesis of novel poly (methylsilsesquioxane) (PMSSQ) copolymers bearing chemically grafted porogen is described. PMSSQ copolymers were prepared by hydrosilylation reaction and subsequent sol-gel polymerization and characterized by GPC, NMR, and FT-IR. Molecular weight of copolymers was controlled by the concentration of comonomer, water and acid catalyst. The thermal behaviors of copolymers were also investigated by thermal gravimetric analysis (TGA) and differential thermal gravimetric analysis (DTGA) and correlated with those of thin films. Nanoporous thin films with low dielectric constant were fabricated after subsequent thermal decomposition of the grafted porogen. |
