| 초록 |
Although silicon carbide (SiC) is a material of excellent acid resistance, the reaction bonded SiC needs an additional protection to withstand the severe condition of semiconductor washing step, in which HF/H2O2 or H2SO4 is used at higher temperature for a long period of time. The coating materials containing fluorinated alkyl groups were selected as a efficient protection material for SiC in preventing the deterioration of physical properties due to the corrosion of surface in acidic condition. Perfluoroalkylsilane, which contained silane groups capable of coupling with oxidized functional groups on SiC surface, was used as a coating material. The incorporation of fluorinated alkyl group on SiC was investigated by varying the conditions of temperature and content of perfluoroalkylsilane. Fluorine group incorporated on SiC surface was confirmed by FTIR-ATR. The morphology of surface treated SiC was studied using SEM/AFM. The chemical resistance of SiC was evaluated in a harsh acidic condition. |
