화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2008년 봄 (05/09 ~ 05/10, 한양대학교(안산))
권호 12권 1호
발표분야 환경에너지
제목 The control of silicon nanowire arrays using catalytic etching
초록 There are a lots of silicon nanowire synthesis methods such as chemical vapor deposition, electrodeposition, etc. However, those are not proper to manipulate the diameter, length, and standing angle of nanowires, moreover, hard to product a large scale production. Recently, metal induced etching method had been introduced for silicon nanowire arrays which could be controlled by the concentration of HF and catalytic metal, etching time, kind of etchant, and temperature. Metal colloid is generally used nanotemplate since it could be introduced well ordered self assembled monolayer on the substrate. In this study, we will demonstrate the smallest silicon nanowire arrays using silver colloids and the new morphology of nanowires.
저자 남상훈, 김연수, 심희상, 이상호, 김원배
소속 광주과학기술원 신소재공학과
키워드 Si nanowire arrays; etching; electrochemistry
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