| 초록 |
Organic thin film transistors (OTFTs) have attracted much attention because of the processability, low cost, and flexibility. However, OTFTs with polymer gate dielectrics have a high threshold voltage due to the low capacitance of polymer gate dielectrics. The sol-gel derived siloxane based organic-inorganic hybrid materials (hybrimers) have the low leakage current density and very smooth surface. In this study, we synthesized photo-patternable methacryl-grafted hybrimers (MD) and fabricated the thin MD gate dielectric layer under 100 nm for low-voltage OTFTs. MD thin films have good electrical properties, including high dielectric strength and low leakage current density down to the 40nm thickness. MD thin films have smooth and hydrophobic surface. OTFTs with 40nm thick MD gate dielectrics are operating within -5V and exhibit a mobility of 0.3 cm2/V s, a threshold voltage of -2.6V, and a small subthreshold swing of 0.43 V/decade. |
