| 학회 | 한국고분자학회 |
| 학술대회 | 2002년 봄 (04/12 ~ 04/13, 서울대학교) |
| 권호 | 27권 1호, p.181 |
| 발표분야 | 특별 심포지엄 |
| 제목 | Dielectric Relaxation Studies on Organic/Inorganic Nanohybrid Thin Films |
| 초록 | Nanoporous poly(methylsilsesquioxane) (PMSSQ) has been extensively studied as a ultra low dielectric materials (k < 2.0) for the next generation logic chips. Nanoporous films of PMSSQ were obtained by thermally decomposing the organic polymer (porogen) in the organic/inorganic hybrids. Given that the content of porogen is not too high, the degradation of the thermally decomposable porogen leaves closed pores, which are ideally identical in shape and volume to the space previously occupied by the porogen. Therefore the studies on the phase separation in organic/inorganic hybrids can provide useful information about the morphology of final pores in films In this study, we have investigated dielectric relaxation behavior of organic/inorganic hybrid films. Dielectric constant and dissipation factor of porogens and hybrid films were monitored in the temperature range between -150 ℃ and 150 ℃. The development and characterization of phase-separated PCL domains and the final morphology and dielectric properties of porous PMSSQ films have been investigated as a function of porogen content. |
| 저자 | 박재만1, 민성규2, 송기태, 이희우, 진문영* |
| 소속 | 1서강대, 2*화학(연) |
| 키워드 | |
