| 학회 | 한국재료학회 |
| 학술대회 | 2004년 봄 (05/14 ~ 05/14, 강릉대학교) |
| 권호 | 10권 1호 |
| 발표분야 | 세라믹스 |
| 제목 | Pulsed Electron Deposition(PED) 법에 의한 SrTiO3 (100)기판위의 SmBa2Cu3O7-δ 박막 성장 |
| 초록 | We have successfully fabricated a good SmBa2Cu3O7-δ(Sm-123) superconducting thin film on SrTiO3 (100) single crystal substrate with the pulsed electron deposition (PED) method which is considered as a cost-effective process in comparison with the pulsed laser deposition method. The Sm-123 taget with 1 inch diameter was prepared by a solid state reaction. Using a newly installed our PED equipment, we tried to optimize the processing conditions by controlling key parameters, including substrate temperature(Ts), ambient oxygen atmosphere(PO2), accelerating voltage and repetition rate of electron beam, the distance between target and substrate. Up to date, the highest critical temperature(Tc) value of 88 K has been obtained from the sample deposited with the following parameters; Ts of 850℃, PO2 of 10 mTorr, acclerating voltage of 16kv and rep. rate of 3Hz and target-to-substrate distance of 9cm. In this presetation, we will present detailed superconducting properties of fabricated films, and discuss the processing-property relationship. This work was supported by a grant from the Center for Applied Superconductivity Technology of the 21st Century Frontier R&D Program funded by the Ministry of Science and Technology, Republic of Korea. |
| 저자 | 고경필, 문승현, 유상임 |
| 소속 | 서울대 |
| 키워드 | PED; SmBa2Cu3O7-δ thin films |
