| 학회 | 한국화학공학회 |
| 학술대회 | 2013년 봄 (04/24 ~ 04/26, 광주 김대중컨벤션센터) |
| 권호 | 19권 1호, p.188 |
| 발표분야 | 공정시스템 |
| 제목 | Economic Analysis of Waste Recycle Process in the Perhydropolysiloxazane Synthesis |
| 초록 | In semiconductor manufacturing process, a small amount of process materials such as PR/Hardmask is used to produce semiconductor from one wafer while many kinds of process materials are required. Therefore, production plant for process material needs small quantity batch production systems. It is required for these systems to improve the productivity and to reduce the production cost. Nowadays, perhydropolysiloxazane (PHPS) solution, one of the process materials, is used for producing silicon oxide film. In the production system of PHPS solution, the amount of pyridine and xylene are needed over twenty times more than that of PHPS solution. The cost of pyridine and xylene accounts for a large portion of the total production cost. In this study, the regeneration process of organic solvent (pyridine and xylene) waste from the production process of PHPS is suggested and economic analysis is performed. |
| 저자 | 윤희찬, 박기호, 양대륙 |
| 소속 | 고려대 |
| 키워드 | semiconductor material; waste regeneration; economics |
| 원문파일 | 초록 보기 |
