| 초록 |
In this study, we report on a novel polymer-nanocomposite dielectric based on tetrafluorophthalic acid functionalized barium titanate (BaTiO3) nanoparticle as a dopant in crosslinkable polyimide (PI). We introduced the barium titanate nanoparticle to make a high k polyimide nanocomposite dielectric. To avoid the large leakage current and low breakdown strength, control over the particle-particle interaction and particle-polymer interface is essential. Thus, approaches to modify nanoparticles via robust chemical bonds are highly desirable. Therefore, the surface of BaTiO3 was modified by TFP to increase the interfacial adhesion between polyimide and nanoparticle. And, we used crosslinked poly(4-vinylphenol) (PVP) as capping layer on polyimide nanocomposite layer to further improve leakage current and surface roughness. Polyimide nanocomposite bilayer film showed high dielectric constant (5.71) and low leakage current density (6.88×10-6A/cm2) in a metal-insulator-metal (MIM) device. |
