화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2016년 봄 (05/02 ~ 05/04, 여수 엑스포 컨벤션)
권호 20권 1호
발표분야 (나노)나노 반도체 소재 및 소자
제목 Engineering Carbon Nanomaterials for Nanoelectronics
초록 Carbon nanostructures such as graphene and carbon nanotubes (CNTs) have unique physical and electrical properties. There is currently interest in taking advantage of these properties for future electronic applications. In this talk, I first present a modified chemical vapor deposition (CVD) technique for the production of large-area, high-quality continuous monolayer graphene films from benzene on Cu at 100–300 °C at ambient pressure. In this method, we extended the graphene growth step in the absence of residual oxidizing species by introducing pumping and purging cycles prior to growth. Next, I introduce well-dispersed CNTs in lithium-doped ZnO (LiZnO) for facilitating high-mobility, low-cost metal-oxide-based thin-film transistors (TFTs), using a simple, wet-chemical functionalization method. The crucial role of surface functionalization of CNTs is clarified with the demonstration of LiZnO TFTs with a field-effect mobility of 28.6 cm2/Vs and an on/off current ratio of 9.3 × 106.
저자 함문호
소속 광주과학기술원
키워드 graphene; chemical vapor deposition; low temperature; carbon nanotube; metal oxide thin-film transistor
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