| 학회 |
한국화학공학회 |
| 학술대회 |
2004년 봄 (04/23 ~ 04/24, 공주대학교) |
| 권호 |
10권 1호, p.909 |
| 발표분야 |
재료 |
| 제목 |
Vast catalyst free growth of carbon nanotubes in hot filament CVD system |
| 초록 |
Multi-wall Carbon nanotubes are successfully grown on pure Si substrate without using a catalyst in the hot filament chemical vapor deposition system. High resolution scanning electron microscopic images of the deposited films show a long noodle shape and vertically grown carbon nanotubes distributed uniformly over a large area of the substrate with relative high growth density. The diameters of the nanotubes vary from 20 nm to 100 nm and the thickness of the grown film is ~1.2 μm. From XRD and EDAX analyses traces of catalyst material is not found except tungsten. X-ray photoelectron spectroscopy (XPS) indicates that presence of Carbon (C1s). Micro Raman spectroscopy reveals that the grown tubes are multi-wall which are in-completely crystallized. |
| 저자 |
서형기1, 김길성1, 신형식1, Ansari S. G.2, 김연수3
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| 소속 |
1전북대, 2JAIST, 3광양보건대 |
| 키워드 |
HFCVD; Diamond; Carbon nanotubes.
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| E-Mail |
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| 원문파일 |
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