화학공학소재연구정보센터
학회 한국재료학회
학술대회 2019년 가을 (10/30 ~ 11/01, 삼척 쏠비치 호텔&리조트)
권호 25권 2호
발표분야 E. 환경/센서 재료 분과
제목 Few-layered black phosphorus와 Pd 3원계 합금을 이용한 고감도 저항형 수소센서 개발
초록 A MEMS-based high-sensitivity resistive type hydrogen sensor using few-layered black phosphorus(BP) decorated Pd-ternary alloy(Pd63.2Ni34.3Co2.5) as sensing material was fabricated. The bulk crystal of BP was exfoliated by liquid exfoliation method. The structural and morphological properties of few-layered BP were studied by field emission scanning electron microscopy(FESEM) and transmission electron microscopy(TEM). The resistance change of the sensor electrode with the H2 gas concentration variation was measured by applying a constant voltage to the micro heater embedded in the hydrogen sensor. The few-layered BP decorated Pd-ternary alloy resistive hydrogen sensor showed good response and sensitivity to H2 gas, and can measure a wide range of hydrogen concentrations, thus can keep safe from the leakage of H2 gas.
저자 유수민, 김정식
소속 서울시립대
키워드 Few-layered black phosphorus; Pd-ternary alloy; Hydrogen sensor; Liquid exfoliation; MEMS.
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