| 초록 |
In this study, the Cu coating layer was fabricated by sputtering and the high energy beam was injected to analyze the mechanical properties of the Cu coating layer before and after irradiation. Various analyses such SEM, XRD, XRF, Nanoindenter for the surface morphology, thickness, crystallinity, and mechanical properties. In particular, the mechanical properties of Martens hardness (HM), Indentation hardness (HIT), Indentation modulus (EIT), Creep, and Indentation eta (ηIT) can be analyzed for various parameters of the material obtained from the force/indentation depth. Like this, functionalization method of thin film using the high energy beam can be a breakthrough technology to improve the mechanical properties of the other metal-based coatings. |
