화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2018년 봄 (04/04 ~ 04/06, 대전컨벤션센터)
권호 43권 1호
발표분야 고분자구조 및 물성
제목 Metrology based on multilayer wrinkling for measuring elastic modulus of thin polymer film above glass transition temperature of polymer
초록 The physical property of polymeric thin films is challenge to be quantified since general measurement system of polymers are not applicable to polymeric thin film. To address this challenge, there are a number of researches on wrinkling based metrology that can estimate elastic modulus by measuring wavelength with relationship between wavelength and elastic modulus. However conventional wrinkling based metrology which employ bilayer system have limitation of temperature. Therefore we presented multilayer wrinkling based metrology that can overcome temperature limit. To introduce this system, we firstly define relationship between wavelength and elastic modulus of each layer of multilayer, because there is a little study on multilayer wrinkling. Then we estimated elastic modulus of polymeric thin film and compared with theoretical values calculated by WLF equation to confirm the validity of the purposed model.
저자 유성수, 유필진
소속 성균관대
키워드 polystyrene; wrinkle; multilayer; thin film; metrology
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