화학공학소재연구정보센터
학회 한국재료학회
학술대회 2017년 봄 (05/17 ~ 05/19, 목포 현대호텔)
권호 23권 1호
발표분야 5. 나노공정과 메타물질(Nano-fabrication and meta-materials)
제목 Facile and practical pattern-formation of hierarchical multi-material using a nanotransfer printing
초록 High resolution nanoscale fabrication has become necessary for next-generation device applications such as new memories, energy generators, transistors, sensors, and optical devices. Among various nanofabrication methods, nanotransfer printing (nTP) has attracted much attention because it can simply create various shapes of functional metal, metal oxide, and semiconductor nanostructures. However, there are still remaining challenges to be resolved to realize more practical and faster formation of multi-functional patterns for future device applications. In this talk, we introduce a facile and useful nTP methodology to generate hierarchical sub-20 nm multi-material structures which consist of several metals and metal oxides by appropriately shadowing and depositing replica patterns. Furthermore, we show a novel resistive multi-memory application of high-density (~0.5 terabits per square inches) multi-memristor cross-bar arrays, showing excellent resistive switching behaviors. This simple and practical approach is extendable to the other nTP techniques and material systems for various future device applications.
저자 박태완, 최영중, 김창일, 백종후, 조정호, 박운익
소속 한국세라믹기술원
키워드 <P>nanotransfer printing; nanostructure; multi-material pattern</P>
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