| 초록 |
Micro-electromechanical systems (MEMS) technology encompasses an enormous variety of applications that generally require 3-D patterning of high-aspect ratio microstructures with tightly controlled mechanical properties. About this, SU-8 which consists of bisphenol-A oligomers and epoxy moiety has been developed already and used widely in MEMS technology. Recently in our lab, we developed new materials for MEMS technology, OT-8 which is bisphenol-A oligomers containing oxetane , photo-crosslinkerable moiety. Oxetane is more stable than epoxy so that synthesis process is more tolerable and product after formulation can be stored for long time without change. We synthesized OT-8 products and formulated and evaluated under the I-line exposure. So we got high-aspect ratio microstructures ( line width 5μm, height over 15μm ) with OT-8 and applied to MEMS technology, especially Ink-jet head process. |
